Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09049862
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Filing Dt:
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03/27/1998
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Inventors:
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RUIPING WANG, GERALD Z. YIN, ROBERT W. WU, JIAN DING
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Title:
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TUNABLE PROCESS FOR SELECTIVELY ETCHING OXIDE USING FLUOROPROPYLENE AND A HYDROFLUOROCARBON
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2880 SCOTT BLVD., P.O. BOX 450A |
| PATENT COUNSEL MS/2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| CHARLES S. GUENZER |
| PATENT COUNSEL MS/2061 |
| 2880 SCOTT BLVD., P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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