Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09290354
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Filing Dt:
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04/12/1999
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Inventors:
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ALLEN S. YU, PAUL J. STEFFAN, BHARATH RANGARAJAN
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Title:
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USE OF PHOTORESIST FOCUS EXPOSURE MATRIX ARRAY AS VIA ETCH MONITOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE AMD PLACE, P.O. BOX 3453 |
| SUNNYVALE, CALIFORNIA 94088 |
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| H. DONALD NELSON |
| 5492 LIVORNO COURT |
| SAN JOSE, CA 95138 |
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