Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09295634
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Filing Dt:
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04/20/1999
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Inventor:
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DARRELL L. MCREYNOLDS
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Title:
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MECHANISM FOR ETCHING A SILICON LAYER IN A PLASMA PROCESSING CHAMBER TO FORM DEEP OPENINGS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER & WEAVER, LLP |
| JOSEPH A. NGUYEN |
| P.O. BOX 61059 |
| PALO ALTO, CA 94306 |
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