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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/27/2001
Application #:
09502117
Filing Dt:
02/10/2000
Inventors:
John M. White, Wendell T. Blonigan, Michael W. Richter
Title:
Multi-function chamber for a substrate processing system
Assignment: 1
Reel/Frame:
010616/0196Recorded: 02/10/2000Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/04/1998
Exec Dt:
06/05/1998
Exec Dt:
06/05/1998
Assignee:
NISHISHINJUKU, SHINJUKU
NO. 1, 7 BAN, 2-CHOME
TOKYO, JAPAN
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
P.O. BOX 450-A
SANTA CLARA, CA 95052

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