Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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08774223
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Filing Dt:
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12/27/1996
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Inventors:
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MASATO TERASAKI, KAZUNORI TSUTSUGUCHI
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Title:
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METHOD OF PLASMA PROCESSING A SUBSTRATE PLACED ON A SUBSTRATE TABLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU |
| TOKYO 164, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
| ATTN: MICHAEL K. MUTTER |
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