Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09259840
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Filing Dt:
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03/01/1999
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Inventors:
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HONG HO-CHENG, KUO-HSING LIU
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Title:
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METHOD FOR MONITORING POLISHING PAD USED IN CHEMICAL-MECHANICAL PLANARIZATION PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 101, SEC 2, KWANG-FU RD. |
| HSINCHU, TAIWAN 300, R.O.C. |
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| LAFF, WHITESEL, CONTE & SARET, LTD. |
| J. WARREN WHIESEL |
| 401 NORTH MICHIGAN AVENUE |
| CHICAGO, ILLINOIS 60606 |
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Assignment:
2
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CORRECTED RECORDATION COVER SHEET ORIGINALLY RECORDED ON MARCH 1, 1999 REEL: 014240 FRAME: 0053
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| NO. 101, SEC. 2, KWANG-FU RD. |
| HSINCHU, TAIWAN 300, R.O.C. |
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| MICHAEL BEST & FRIEDRICH, LLP |
| PERRY J. HOFFMAN |
| 401 N. MICHIGAN AVENUE |
| SUITE 1900 |
| CHICAGO, IL 60611-4212 |
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