Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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08533174
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Filing Dt:
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09/25/1995
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Inventors:
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BEN PANG, DAVID CHEUNG, WILLIAM N. TAYLOR JR, SEBASTIEN RAOUX, MARK FODOR
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Title:
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METHOD AND APPARATUS FOR CLEANING A VACUUM LINE IN A CVD SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL MS/2061 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| LEGAL AFFAIRS DEPT. |
| 3050 BOWERS AVE. M/S 2061 |
| SANTA CLARA, CA 95054 |
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