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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/03/2001
Application #:
09313775
Filing Dt:
05/18/1999
Inventors:
HIROYUKI SAKAI, KAZUTAKA MATSUO
Title:
APPARATUS AND METHOD OF CLEANING NOZZLE AND APPARATUS OF PROCESSING SUBSTRATE
Assignment: 1
Reel/Frame:
009986/0953Recorded: 05/18/1999Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/26/1999
Exec Dt:
04/26/1999
Assignee:
3-6 AKASAKA 5-CHOME, MINATO-KU
TOKYO, 107-8481, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER ET AL
C. IRVIN MCCLELLAND
1755 JEFFERSON DAVIS HIGHWAY
4TH FLOOR
ARLINGTON, VA 22202

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