Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09251690
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Filing Dt:
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02/17/1999
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Inventors:
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RALF HOFMANN, ZHENG XU
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Title:
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METHOD AND APPARATUS FOR REDUCING PLASMA NONUNIFORMITY ACROSS THE SURFACE OF A SUBSTRATE IN APPARATUS FOR PRODUCING AN IONIZED METAL PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY, PATENT COUNSEL |
| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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