Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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08881710
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Filing Dt:
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06/24/1997
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Inventors:
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YUN-YEN JACK YANG, CHING-HWA CHEN, YEA-JER ARTHUR CHEN
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Title:
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METAL AND METAL SILICIDE NITRIDIZATION IN A HIGH DENSITY, LOW PRESURE PLASMA REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HICKMAN BEYER & WEAVER, LLP |
| HARMOHINDER S. BEDI |
| P.O. BOX 61059 |
| PALO ALTO, CA 94306 |
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