Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09280439
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Filing Dt:
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03/29/1999
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Inventors:
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ROBERT G. BOEHM JR., ANIL K. PANT, WILBUR C. KRUSELL, ERIK H. ENGDAHL
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Title:
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METHOD AND APPARATUS FOR STABILIZING THE PROCESS TEMPERATURE DURING CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BLAKELY SOKOLOFF TAYLOR & ZAFMAN, LLP |
| WILLIAM W. KIDD |
| 12400 WILSHIRE BOULEVARD |
| SEVENTH FLOOR |
| LOS ANGELES, CA 90025 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054-3299 |
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| PATTERSON & SHERIDAN, L.L.P. |
| 3040 POST OAK BLVD., SUITE 1500 |
| HOUSTON, TX 77056-6582 |
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