Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09539293
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Filing Dt:
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03/30/2000
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Inventors:
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Alan J Miller, Fandayani Soesilo
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Title:
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In situ and ex situ hardmask process for STI with oxide collar application
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER WEAVER & THOMAS, LLP |
| JEFFREY D. WHEELER |
| P.O. BOX 130 |
| MOUNTAIN VIEW, CA 94042-0130 |
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