Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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08804584
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Filing Dt:
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02/24/1997
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Inventors:
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JEFFREY A. TOBIN, JEFFREY C. BENZING, ELIOT K. BROADBENT, J. KIRKWOOD H. ROUGH
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Title:
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Plasma Process Apparatus for Integrated Circuit Fabrication Having Dome-Shaped Induction Coil
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN, MORRILL, MACPHERSON, ET AL. |
| DAVID E. STEUBER |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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