Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09397956
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Filing Dt:
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09/17/1999
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Inventors:
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VLADIMIR STAROV, SYED S. BASHA, KRISHAN SHRINIVASAN, KAREN A. REINHARDT et al
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Title:
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METHOD AND APPARATUS FOR REMOVING POST-ETCH RESIDUES AND OTHER ADHERENT MATRICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2730 JUNCTION AVENUE |
| SAN JOSE, CALIFORNIA 95134 |
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| TOWNSEND AND TOWNSEND AND CREW LLP |
| CHUN-POK LEUNG |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CALIFORNIA 94111-3834 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL DEPARTMENT / ROLAND TSO |
| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| NOVELLUS SYSTEMS, INC. |
| ROLAND TSO |
| 4000 NORTH FIRST STREET |
| SAN JOSE, CA 95134 |
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