Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09099147
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Filing Dt:
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06/18/1998
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Inventor:
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HIROYUKI SEKIGUCHI
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Title:
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EXPOSURE APPARATUS WITH SETTING OF STAGE DRIVING IN ACCORDANCE WITH TYPE OF MOTION OF STAGE AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| DANIEL S. GLUECK |
| 277 PARK AVENUE |
| NEW YORK, NY 10172-0194 |
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