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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6238588
Issue Dt:
05/29/2001
Application #:
08733554
Filing Dt:
10/21/1996
Inventors:
KENNETH COLLINS, DAVID GROECHEL, RAYMOND HUNG, MICHAEL RICE, GERALD YIN, JIAN DING et al
Title:
HIGH PRESSURE HIGH NON-REACTIVE DILUENT GAS CONTENT HIGH PLASMA ION DENSITY PLASMA OXIDE ETCH PROCESS
Assignment: 1
Reel/Frame:
008438/0443Recorded: 03/06/1997Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
COLLINS, KENNETH
Exec Dt:
02/12/1997
GROECHEL, DAVID
Exec Dt:
02/18/1997
HUNG, RAYMOND
Exec Dt:
02/13/1997
RICE, MICHAEL
Exec Dt:
02/19/1997
YIN, GERALD
Exec Dt:
02/13/1997
DING, JIAN
Exec Dt:
02/13/1997
CUI, CHUNSHI
Exec Dt:
02/13/1997
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450A
LEGAL DEPARTMENT
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
PETER S. SQARBOSSA
LEGAL DEPARTMENT
P.O. BOX 450A
SANTA CLARA, CA 95052

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