Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09163711
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Filing Dt:
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09/30/1998
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Inventors:
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ANAND VASUDEV, TOSHIO ITOH, RAMANUJAPURAM A. SRINIVAS, FREDERICK WU, LI WU, BRIAN BOYLE et al
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Title:
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METHOD FOR CLEANING A PROCESS CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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