Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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08634373
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Filing Dt:
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04/18/1996
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Inventor:
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KAZUYA KAMON
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Title:
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PROJECTION ALIGNER, ABERRATION ESTIMATING MASK PATTERN, ABERRATION QUANTITY ESTIMATING METHOD, ABERRATION ELIMINATING FILTER AND SEMICONDUCTOR MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL |
| JOSEPH A. SCAFETTA, JR. |
| ATTORNEY AT LAW |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1753, SHIMONUMABE, NAKAHARA-KU, KAWASAKI-SHI, |
| KANAGAWA, JAPAN 211-8668 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 THIRTEENTH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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