Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09552491
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Filing Dt:
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04/19/2000
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Inventors:
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Douglas Bonser, Anthony J. Toprac, Matthew Purdy, John R. Behnke, James H. Hussey JR.
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Title:
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Method and apparatus for control of critical dimension using feedback etch control
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS, MORGAN & AMERSON, P.C. |
| J. MIKE AMERSON |
| 7676 HILLMONT, SUITE 250 |
| HOUSTON, TEXAS 77040 |
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