Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09116649
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Filing Dt:
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07/16/1998
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Inventors:
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BUTRUS T. KHURI-YAKUB, SUSAN MORTON, F. LEVENT DEGERTEKIN
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Title:
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ULTRASONIC PHOTORESIST PROCESS MONITOR AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SUITE 350 |
| 900 WELCH ROAD |
| PALO ALTO, CALIFORNIA 94304 |
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| FELHR HOHBACH TEST, ALBRITTON, ETAL |
| ALDO J. TEST |
| SUITE 3400 |
| FOUR EMBARCADERO CENTER |
| SAN FRANCISCO, CA 94111-4187 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| AFOSR/JA |
| 801 N. RANDOLPH STREET - ROOM 732 |
| ARLINGTON, VIRGINIA 22203 |
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| UNITED STATES AIR FORCE |
| TIMOTHY A. HICKS, MAJ, USAF |
| AFOSR/JA |
| 801 N. RANDOLPH STREET - RM 732 |
| ARLINGTON, VA 22203-1977 |
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