Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09453886
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Filing Dt:
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02/22/2000
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Inventors:
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Yoshiki Aruga, Koji Maeda
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Title:
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Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUCHU-SHI |
| 8-1 YOTSUYA 5-CHOME |
| TOKYO 183, JAPAN |
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| BURNS, DOANE, SWECKER & MATHIS, LLP |
| PLATON N. MANDROS |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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