Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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08743059
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Filing Dt:
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11/04/1996
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Inventors:
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KENNETH S. COLLINS, CRAIG RODERICK, DOUGLAS BUCHBERGER, JOHN TROW, VIKTOR SHEL
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Title:
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RF TUNING METHOD FOR AN RF PLASMA REACTOR USING FREQUENCY SERVOING AND POWER, VOLTAGE, CURRENT OR DI/DT CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A, LEGAL DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| PETER S. SGARBOSSA |
| LEGAL DEPT. |
| P.O. BOX 405A |
| SANTA CLARA, CA 95052 |
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