Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09198093
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Filing Dt:
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11/23/1998
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Inventors:
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KOJI TOMITA, MUNEO MAESHIMA, SHIGERU MATSUI, YOSHITAKA KODAMA, HITOSHI KOMURO et al
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Title:
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DEFECT INSPECTION APPARATUS FOR SILICON WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-CHOME, CHIYODA-KU |
| 6, KANDA SURUGADAI |
| TOKYO 101-8010, JAPAN |
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| KENYON & KENYON |
| EDWARD W. GREASON |
| ONE BROADWAY |
| NEW YORK, NY 10004 |
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