Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09166593
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Filing Dt:
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10/06/1998
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Inventors:
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KENYA MORINISHI, MASAMI OHTANI, JOICHI NISHIMURA, AKIHIKO MORITA
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Title:
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SUBSTRATE CLEANING APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-CHOME, HORIKAWA-DORI |
| 1-1, TENJINKITAMACHI, TERANOUCHI-AGARU |
| KAMIKYO-KU, KYOTO, JAPAN |
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| NIKAIDO, MARMELSTEIN, MURRAY ET AL |
| GEORGE E. ORAM, JR. |
| METROPOLITAN SQUARE 655 15TH ST., N.W. |
| SUITE 330 - G STREET LOBBY |
| WASHINGTON, D.C. 20005-5701 |
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