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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/17/2001
Application #:
08360515
Filing Dt:
12/21/1994
Inventors:
TOSHIHIRO SASAYA, KAZUMASA ENDO, KAZUO USHIDA
Title:
METHOD OF MANUFACTURING AND USING CORRECTION MEMBER TO CORRECT ABERRATION IN PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
007294/0190Recorded: 12/21/1994Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/12/1994
Exec Dt:
12/07/1994
Exec Dt:
12/07/1994
Assignee:
2-3, MARUNOUCHI 3-CHOME
CHIYODA-KU, TOKYO, JAPAN
Correspondent:
PENNIE & EDMONDS
CHARLES E. MILLER
1155 AVENUE OF THE AMERICAS
NEW YORK, NY 10036

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