Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09467389
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Filing Dt:
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12/21/1999
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Inventors:
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JIANOU SHI, THOMAS W. MOUNTSIER, MARY ANNE PLANO, JOSEPH R. LAIA
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Title:
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METHOD OF MINIMIZING REACTIVE ION ETCH DAMAGE OF ORGANIC INSULATING LAYERS IN SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET, M/S 280 |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN, MORRILL, MACPHERSON, ET AL |
| ROBERTA P. SAXON |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CALIFORNIA 95110 |
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