Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09281808
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Filing Dt:
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03/31/1999
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Inventors:
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ARTHUR M. HOWALD, JOHN P. HOLLAND, CHRISTOPHER OLSON
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Title:
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PLASMA PROCESSING METHOD AND APPARATUS WITH CONTROL OF RF BIAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| LOWE HAUPTMAN GOPSTEIN GILMAN & BERNER |
| BENJAMIN HAUPTMAN |
| 1700 DIAGONAL ROAD, SUITE 310 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| LOWE HAUPTMAN GOPSTEIN GILMAN & BERNER |
| BENJAMIN J. HAUPTMAN |
| 1700 DIAGONAL ROAD, SUITE 310 |
| ALEXANDRIA, VA 22314 |
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