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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6267131
Issue Dt:
07/31/2001
Application #:
09594345
Filing Dt:
06/15/2000
Inventors:
MUTSUO MASADA, MASAO NAKATA, MASAHIRO SHIRAISHI, MAKOTO OGAWA, YUKIHARU OKUBO et al
Title:
METHOD OF CONTROLLING PRESSURE IN A CHAMBER, APPARATUS FOR THE SAME, AND EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
010906/0950Recorded: 06/15/2000Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MASADA, MUTSUO
Exec Dt:
06/05/2000
NAKATA, MASAO
Exec Dt:
06/06/2000
SHIRAISHI, MASAHIRO
Exec Dt:
06/05/2000
OGAWA, MAKOTO
Exec Dt:
06/05/2000
KATO, KATSUHIRO
Exec Dt:
05/30/2000
OKUBO, YUKIHARU
Exec Dt:
05/31/2000
Assignee:
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME
CHIYODA-KU, TOKYO, JAPAN
Correspondent:
OLIFF & BERRIDGE, PLC
JAMES A. OLIFF
P.O. BOX 19928
ALEXANDRIA, VA 22320

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