Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09558522
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Filing Dt:
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04/26/2000
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Inventor:
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Woo Sik Yoo
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Title:
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Heat management in wafer processing equipment using thermoelectric device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 250 EAST GISH ROAD |
| SAN JOSE, CALIFORNIA 95112 |
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| SKJERVEN, MORRILL, MACPHERSON, FRANKLIN |
| & FRIEL LLP |
| THEODORE P. LOPEZ |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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