Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09515695
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Filing Dt:
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02/29/2000
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Inventors:
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Jeng H. Hwang, Steve S. Y. Mak, Yan Ye
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Title:
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APPARATUS AND METHOD FOR SHIELDING A DIELECTRIC MEMBER TO ALLOW
FOR STABLE POWER TRANSMISSION INTO A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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