Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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08937156
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Filing Dt:
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09/25/1997
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Inventors:
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IKUNAO ISOMURA, HIDEO TSUCHIYA
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Title:
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PATTERN DATA GENERATING APPARATUS AND METHOD FOR INSPECTING DEFECTS IN FINE PATTERNS IN A PHOTOMASK OR SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL |
| ATTORNEYS AT LAW |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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