Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09153935
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Filing Dt:
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09/16/1998
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Publication #:
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Pub Dt:
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05/31/2001
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Inventor:
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BAUSAN YUAN
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Title:
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METHOD AND APPARATUS FOR CONTROLLING THE LEVELING TABLE OF A WAFER STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6-3 NISHI-OHI, 1-CHOME |
SHINAGAWA-KU, TOKYO 140, JAPAN |
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MORRISON & FOERSTER LLP |
ROBERT A. SALTZBERG |
425 MARKET STREET |
SAN FRANCISCO, CA 94105-2482 |
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