Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09346563
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Filing Dt:
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06/30/1999
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Inventor:
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ALAN J. MILLER
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Title:
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METHOD OF ACHIEVING TOP ROUNDING AND UNIFORM ETCH DEPTHS WHILE ETCHING SHALLOW TRENCH ISOLATION FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538-6470 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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