Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09458807
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Filing Dt:
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12/10/1999
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Inventors:
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MASAYUKI AKAGAWA, OSAMU YAMASHITA, TAICHI TANIUCHI
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Title:
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OPTICAL DEVICE METHOD OF CLEANING THE SAME PROJECTION ALIGNER AND METHOD OF PRODUCING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| ARMSTRONG, WESTERMAN, HATTORI ET AL. |
| LE-NHUNG MCLELAND |
| 1725 K STREET, N.W., SUITE 1000 |
| WASHINGTON, D.C. 20006 |
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