Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09333931
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Filing Dt:
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06/16/1999
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Inventors:
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TIMOTHY R. GROVES, STEVEN D. GOLLADAY, HANS C. PFEIFFER
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Title:
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COMPENSATION OF WITHIN-SUBFIELD LINEWIDTH VARIATION IN E-BEAM PROJECTION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OHI PLANT |
| 6-3, NISHI-OHI 1-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN 140-6 |
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| WHITHAM, CURTIS & WHITHAM |
| ANDREW M. CALDERON |
| RESTON INTERNATIONAL CENTER |
| 11800 SUNRISE VALLEY DRIVE - SUITE 900 |
| RESTON, VIRGINIA 20191 |
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