Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09163301
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Filing Dt:
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09/30/1998
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Inventors:
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HELEN ZHU, ROGER F. LINDQUIST
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Title:
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METHOD OF PLASMA ETCHING DIELECTRIC MATERIALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS, DOANE, SWECKER & MATHIS, L.L.P. |
| JAMES W. PETERSON |
| P.O. BOX 1404 |
| ALEXANDRIA, VIRGINIA 22313-1404 |
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