Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09032100
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Filing Dt:
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02/27/1998
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Inventors:
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BAORUI YANG, CHRISTOPHE PIERRAT
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Title:
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INSPECTION METHOD AND APPARATUS FOR DETECTING DEFECTS ON PHOTOMASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8000 SOUTH FEDERAL WAY |
| BOISE, IDAHO 83716 |
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| SCHWEGMAN, LUNDBERG, WOESSNER & KLUTH |
| CATHERINE I. KLIMA-SILBERG |
| P.O. BOX 2938 |
| MINNEAPOLIS, MN 55402 |
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