Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09735150
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Filing Dt:
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12/12/2000
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Publication #:
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Pub Dt:
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06/28/2001
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Inventors:
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Yuji Kamikawa, Shigenori Kitahara, Kinya Ueno
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Title:
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Substrate processing apparatus and substrate processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| MORRISON & FOERSTER LLP |
| DAVID L. FEHRMAN |
| 555 WEST FIFTH STREET |
| SUITE 3500 |
| LOS ANGELES, CA 90013-1024 |
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