Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/09/2001
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Application #:
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09501967
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Filing Dt:
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02/10/2000
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Inventors:
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Yelehanka Ramachandramurthy Pradeep, Vijakomar Chhagan, Henry Gerung
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Title:
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Repeatable end point method for anisotropic etch of inorganic buried anti-reflective coating layer over silicon
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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STREET 2 |
60 WOODLANDS INDUSTRIAL PARK D |
SINGAPORE, SINGAPORE 73840 |
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GEORGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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04/29/2024 01:07 AM
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