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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6302130
Issue Dt:
10/16/2001
Application #:
09529985
Filing Dt:
07/18/2000
Inventors:
TADAHIRO OHMI, IIDA SEIICHI, NOBUKAZU IKEDA, SATOSHI KAGATSUME, JUN HIROSE, KOUJI NISHINO et al
Title:
METHOD FOR DETECTING PLUGGING OF PRESSURE FLOW-RATE CONTROLLER AND SENSOR USED THEREFOR
Assignment: 1
Reel/Frame:
012239/0059Recorded: 10/09/2001Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
OHMI, TADAHIRO
Exec Dt:
08/06/2001
IIDA, SEIICHI
Exec Dt:
08/25/2001
KAGATSUME, SATOSHI
Exec Dt:
08/20/2001
HIROSE, JUN
Exec Dt:
08/21/2001
NISHINO, KOUJI
Exec Dt:
06/30/2001
IKEDA, NOBUKAZU
Exec Dt:
06/30/2001
YAMAJI, MICHIO
Exec Dt:
07/03/2001
DOHI, RYOUSUKE
Exec Dt:
06/30/2001
YOSHIKAWA, KAZUHIRO
Exec Dt:
06/30/2001
KOYOMOGI, MUTSUNORI
Exec Dt:
07/11/2001
UNO, TOMIO
Exec Dt:
06/30/2001
IDETA, EIJI
Exec Dt:
06/30/2001
HIROSE, TAKASHI
Exec Dt:
07/03/2001
Assignees:
FUJIKIN INCORPORATED
NISHI-KU, OSAKA-SHI
3-2, ITACHIBORI 2-CHOME
OSAKA 550-0012, JAPAN
TADAHIRO OHMI
AOBA-KU, SENDAI-SHI
1-17-301, KOMEGAHUKURO 2-CHOME
MIYAGI 90-0813, JAPAN
TOKYO ELECTRON LTD.
AOBA-KU, SENDAI-SHI
3-6, AKASAKA 5-CHOME
MINATO-KU TOKYO 107-0052, JAPAN
Correspondent:
GRIFFIN & SZIPL, P.C.
B. FRANKLIN GRIFFIN, JR.
SUITE PH-1, 2300 NINTH STREET, SOUTH
ARLINGTON, VA 22204-2320

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