Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09501653
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Filing Dt:
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02/10/2000
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Inventors:
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Robert A Coles, John W Golz, Qinghuang Lin, Teresa j Wu, Alan C Thomas et al
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Title:
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Method for resist filling and planarization of high aspect ratio features
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| RATNER & PRESTIA |
| KEVIN R. CASEY |
| SUITE 301, ONE WESTLAKES, BERWYN |
| P.O. BOX 980 |
| VALLEY FORGE, PA 19482-0980 |
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