Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09568793
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Filing Dt:
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05/09/2000
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Inventors:
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Xu Li, Yuexing Zhao, Diane J. Hymes, John M. de Larios
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Title:
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Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA & KIM, LLP |
| PETER B. MARTINE |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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