Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09599143
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Filing Dt:
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06/21/2000
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Inventor:
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Andrew Li
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Title:
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Methods of selectively etching polysilicon relative to at least one of deposited oxide, thermally grown oxide and nitride, and methods of selectively etching polysilicon relative to BPSG
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8000 SOUTH FEDERAL WAY |
| BOISE, IDAHO 83716 |
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| WELLS, ST. JOHN, ROBERTS, GREGORY ET AL |
| MARK S. MATKIN |
| 601 W. FIRST AVENUE, SUITE 1300 |
| SPOKANE, WA 99201-3828 |
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