Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09329631
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Filing Dt:
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06/10/1999
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Inventor:
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SHIGERU MARUYAMA
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Title:
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METHOD OF FABRICATING DEFLECTION APERTURE ARRAY FOR ELECTRON BEAM EXPOSURE APPARATUS, WET ETCHING METHOD AND APPARATUS FOR FABRICATING THE APERTURE ARRAY, AND ELECTRON BEAM EXPOSURE APPARATUS HAVING THE APERTURE ARRAY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 32-1, ASAHI-CHO 1-CHOME |
| NERIMA-KU, TOKYO, JAPAN |
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| CHRISTIE, PARKER & HALE, LLP |
| D. BRUCE PROUT |
| P.O. BOX 7068 |
| PASADENA, CA 91109-7068 |
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