Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09139149
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Filing Dt:
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08/24/1998
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Inventors:
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STEVEN E. GIANOULAKIS, AVIJIT K. RAY-CHAUDHURI
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Title:
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LOW THERMAL DISTORTION EXTREME-UV LITHOGRAPHY RETICLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BLVD. - MS SCI-02 |
| SANTA CLARA, CALIFORNIA 94052 |
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| SANDIA NATL. LABS - MS 9031 |
| KURT C. OLSEN |
| P.O. BOX 969 |
| LIVERMORE, CA 94551-0969 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DISTRICT OF COLUMBIA 20585-0162 |
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| U.S. DEPARTMENT OF ENERGY |
| BETTY A. WINCHESTER |
| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DC 208585-0162 |
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