Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09777380
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Filing Dt:
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02/06/2001
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Inventors:
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Richard J. Lebel, Frederic Maurer, Rock Nadeau, Paul H. Smith JR. et al
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Title:
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Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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MCGINN & GIBB, PLLC |
CHRISTOPHER N. SEARS |
8321 OLD COURTHOUSE ROAD |
SUITE 200 |
VIENNA VA 22182-3817 |
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