Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/04/2001
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Application #:
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09521649
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Filing Dt:
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03/08/2000
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Inventor:
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Toshiaki Hongoh
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Title:
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Flat antenna having openings provided with conductive materials accommodated therein an plasma processing apparatus using the flat antenna
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| PILLSBURY MADISON & SUTRO LLP |
| GLENN J. PERRY |
| INTELLECTUAL PROPERTY GROUP |
| 1100 NEW YORK AVENUE, NW, NINTH FLOOR |
| WASHINGTON, DC 20005-3918 |
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