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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	6326635	Issue Dt:	12/04/2001	Application #:	09365589	Filing Dt:	07/30/1999
Inventors:	ROBERT INNES, LEE H. VENEKLASEN, ALLAN L. SAGLE, SERGEY V. BABIN, CHEN HWA
Title:	MINIMIZATION OF ELECTRON FOGGING IN ELECTRON BEAM LITHOGRAPHY

Assignment: 1

Reel/Frame:

010376/0881

Recorded: 11/09/1999

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

INNES, ROBERT

Exec Dt:

10/19/1999

VENEKLASEN, LEE H.

Exec Dt:

10/19/1999

SAGLE, ALLAN L.

Exec Dt:

10/19/1999

BABIN, SERGEY V.

Exec Dt:

10/19/1999

HWA, CHEN

Exec Dt:

10/19/1999

Assignee:

ETEC SYSTEMS, INC.

26460 CORPORATE AVENUE

HAYWARD, CALIFORNIA 94545

Correspondent:

SKJERVEN, MORRILL, MACPHERSON, ETAL

NORMAN R. KLIVANS

25 METRO DRIVE, SUITE 700

SAN JOSE, CA 95110

Assignment: 2

Reel/Frame:

011945/0380

Recorded: 07/03/2001

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

ETEC SYSTEMS, INC.

Exec Dt:

06/15/2001

Assignee:

APPLIED MATERIALS, INC.

M/S 2061

2881 SCOTT BLVD.

SANTA CLARA, CALIFORNIA 95050

Correspondent:

APPLIED MATERIALS, INC.

ATTN: PATENT GROUP

2881 SCOTT BLVD. M/S 2061

SANTA CLARA, CA 95050

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