Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09543393
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Filing Dt:
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04/05/2000
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Inventors:
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Kenneth Tsai, Joseph Yudovsky, Steve Ghanayem, Maitreyee Mahajani, Ken K. Lai et al
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Title:
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Apparatus and method for aligning and controlling edge deposition on a substrate
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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