Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/25/2001
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Application #:
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09538736
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Filing Dt:
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03/30/2000
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Inventors:
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Seiji Kozawa, Naruaki Iida, Jun Ookura
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Title:
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Transfer device centering method and substrate processing apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| RADER, FISHMAN & GRAUER |
| MONICA MILLNER |
| 1233 20TH STREET, NW |
| SUITE 501 |
| WASHINGTON, D.C. 20036 |
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